Research Article
Vibration Modes and Parameter Analysis of V-Shaped Electrothermal Microactuators
Table 3
Comparison between analytical and simulation results.
| | Modal analysis | | Frequency, ( Hz) | Modal analysis |
| | 1st order | Analytical | 1.11 | 0.338177 | | | ANSYS | 0.334449 | | | Analytical | −0.44 | 0.502632 | | | ANSYS | 0.504842 | |
| | 2nd order | Analytical | −0.11 | 0.560596 | | | ANSYS | 0.561225 | | | Analytical | −0.39 | 1.18794 | | | ANSYS | 1.19258 | |
| | 3rd order | Analytical | −0.01 | 1.49752 | | | ANSYS | 1.49766 | | | Analytical | −0.15 | 2.05425 | | | ANSYS | 2.05734 | |
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