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Shock and Vibration
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Special Issues
Shock and Vibration
/
2018
/
Article
/
Tab 4
/
Research Article
Vibration Modes and Parameter Analysis of V-Shaped Electrothermal Microactuators
Table 4
Material properties comparisons.
ā
Polysilicon [
43
]
Silicon [
44
]
Gold [
43
]
Aluminium [
43
]
Nickel [
43
]
SU-8 [
45
]
(
)