Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

<div>Measured quality factor<i> Q</i><sub><i>tot</i></sub> with temperature<i> T</i> changing at the pressure of 10Pa.</div>

Shock and Vibration

Figure 14: Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope 