Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

<div>Estimated<i> Q</i><sub><i>anc</i></sub> versus sweeping layer number<i> n</i>.</div>

Shock and Vibration

Figure 6: Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope 