Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

<div>Quality factor<i> Q</i><sub><i>air</i></sub> versus temperature<i> T</i> at the pressure of 10Pa.</div>

Shock and Vibration

Figure 9: Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope 