Research Article
Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope
Table 2
QUALITY FACTOR OF DAMPING DISSIPATION.
| | | Quality factor | Value | Percentage of 1/Q |
| | Intrinsic dissipation | Qthe | 241000 | 17.60% | | Qanc | 593700 | 7.14% | | Qakh | 1.09 × 1011 | ≈0 |
| | Extrinsic dissipation | Qsur | / | / | | Qair | 56345 | 75.26% |
| | Total dissipation | Qtot | 42405 | / |
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