Research Article
Optimal Design and Simulation of a Microsuction Cup Integrated with a Valveless Piezoelectric Pump for Robotics
Table 1
Geometric sizes of a gas micropump [
9].
| | Item | Data |
| Piezoelectric actuator | Piezoelectric material layer radius (mm) | 5 | Piezoelectric material layer thickness (mm) | 0.2 | Elastic substrates radius (mm) | 6 | Elastic substrates thickness (mm) | 0.15 |
| Cone tube | Expanding length (mm) | 3 | Minimum section width (mm) | 0.12 | Maximum section width (mm) | 0.64 | Expanding angle (°) | 10 | Depth (mm) | 0.1 |
| Vibrating cavity | Radius (mm) | 6 | Depth (mm) | 0.1 |
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