Optimal Design and Simulation of a Microsuction Cup Integrated with a Valveless Piezoelectric Pump for Robotics

Table 1

Geometric sizes of a gas micropump [9].

	Item	Data
Piezoelectric actuator	Piezoelectric material layer radius (mm)	5
	Piezoelectric material layer thickness (mm)	0.2
	Elastic substrates radius (mm)	6
	Elastic substrates thickness (mm)	0.15
Cone tube	Expanding length (mm)	3
	Minimum section width (mm)	0.12
	Maximum section width (mm)	0.64
	Expanding angle (°)	10
	Depth (mm)	0.1
Vibrating cavity	Radius (mm)	6
	Depth (mm)	0.1