Optimal Design and Simulation of a Microsuction Cup Integrated with a Valveless Piezoelectric Pump for Robotics

Table 3

Equivalent electrical network parameters of the micropump suction cup.

Cone tube	Diffuser flow resistance (Jsm^−6)
	Diffuser flow inductance (Js^2m^−6)
	Nozzle flow resistance (Jsm^−6)
	Nozzle flow inductance (Js^2m^−6)
Vibrating cavity	Flow Capacitance (m^6J^−1)
	Flow inductance (Js^2m^−6)
Suction cavity	Flow Capacitance (m^6J^−1)
	Flow inductance (Js^2m^−6)