Multi-DOF Ultrasonic Actuators for Laser Beam Positioning

Table 1

Properties of the materials used for simulation.

Material properties	Piezoceramic PZT-8	Neodymium magnet	Silicone
Young’s modulus (N/m^2)		1.6e + 11	4.2e + 6
Poisson’s ratio		0.24	0.43
Density (kg/m^3)	7600	7500	1270
Dielectric permittivity matrix, x10^−7(F/m)	ε11 = 11.42; ε33 = 8.85
Piezoelectric matrix (C/m^2)	e13 = −18.01; e33 = 29.48; e51 = 10.34
Elasticity matrix, x10^10 (N/m^2)	c11 = 14.68; c12 = 8.108; c13 = 8.105; c33 = 13.17; c44 = 3.29; c66 = 3.14