Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports

<div>Amplitude-frequency curve: <i>V</i><sub>D</sub> = 2.6 V. (a) <span class="nowrap"><svg height="11.576pt" id="M178" style="vertical-align:-3.22718pt" version="1.1" viewbox="-0.0498162 -8.34882 33.9107 11.576" width="33.9107pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M484 406C484 429 465 448 438 448C400 448 352 405 302 356L156 213L191 373C195 391 197 404 197 416C197 436 191 448 178 448C151 448 83 406 23 350L37 328C67 350 101 369 109 369C114 369 115 362 111 344L29 -5L34 -12C63 -5 86 -1 111 3C124 73 137 138 147 161C165 180 189 202 206 217C215 194 249 111 275 57C304 -1 319 -12 342 -12C368 -12 405 -5 471 92L454 115C427 80 395 55 384 55C374 55 364 58 341 106L262 274C282 296 367 378 414 378C427 378 440 370 444 367C449 363 454 362 462 368C476 379 484 395 484 406Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,6.266,3.132)"><path d="M639 21C616 28 593 39 566 68C542 92 523 117 486 170C457 215 415 282 397 314C472 346 524 398 524 485C524 545 497 590 456 617C417 641 369 650 296 650H43V617C122 612 130 608 130 523V129C130 45 122 38 38 33V0H306V33C225 38 216 45 216 129V282H249C302 282 319 270 336 243C365 195 401 132 436 84C483 18 525 -5 597 -8C610 -9 622 -9 635 -9L639 21ZM216 319V559C216 586 219 596 227 603S250 613 281 613C356 613 429 576 429 469C429 416 413 379 374 348C349 327 316 319 265 319H216Z"></path></g><g transform="matrix(.013,0,0,-0.013,16.233,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z"></path></g><g transform="matrix(.013,0,0,-0.013,27.496,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z"></path></g></svg>;</span> (b) <span class="nowrap"><svg height="11.3411pt" id="M179" style="vertical-align:-3.22715pt" version="1.1" viewbox="-0.0498162 -8.11395 33.9107 11.3411" width="33.9107pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M484 406C484 429 465 448 438 448C400 448 352 405 302 356L156 213L191 373C195 391 197 404 197 416C197 436 191 448 178 448C151 448 83 406 23 350L37 328C67 350 101 369 109 369C114 369 115 362 111 344L29 -5L34 -12C63 -5 86 -1 111 3C124 73 137 138 147 161C165 180 189 202 206 217C215 194 249 111 275 57C304 -1 319 -12 342 -12C368 -12 405 -5 471 92L454 115C427 80 395 55 384 55C374 55 364 58 341 106L262 274C282 296 367 378 414 378C427 378 440 370 444 367C449 363 454 362 462 368C476 379 484 395 484 406Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,6.266,3.132)"><path d="M639 21C616 28 593 39 566 68C542 92 523 117 486 170C457 215 415 282 397 314C472 346 524 398 524 485C524 545 497 590 456 617C417 641 369 650 296 650H43V617C122 612 130 608 130 523V129C130 45 122 38 38 33V0H306V33C225 38 216 45 216 129V282H249C302 282 319 270 336 243C365 195 401 132 436 84C483 18 525 -5 597 -8C610 -9 622 -9 635 -9L639 21ZM216 319V559C216 586 219 596 227 603S250 613 281 613C356 613 429 576 429 469C429 416 413 379 374 348C349 327 316 319 265 319H216Z"></path></g><g transform="matrix(.013,0,0,-0.013,16.233,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z"></path></g><g transform="matrix(.013,0,0,-0.013,27.496,0)"><path d="M153 550H386L412 615L406 623H120L82 318C104 327 142 338 184 338C294 338 347 275 347 187C347 112 305 39 221 39C160 39 119 71 97 89C88 97 80 96 71 90C59 80 50 67 49 57C48 45 52 36 66 23C80 9 123 -12 169 -12C221 -11 288 15 342 59C403 109 431 165 431 225C431 308 366 395 238 395C212 395 165 379 127 364L153 550Z"></path></g></svg>.</span></div>

Shock and Vibration

fig17

Figure 17

Figure 17: Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports 