Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports

<div>The effect of rotational stiffness on first-order frequency natural frequency. (a) Relationship between natural frequency and DC voltage under different rotational stiffness. (b) Variation trend of the natural frequency with rotational stiffness.</div>

Shock and Vibration

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Figure 5

Figure 5: Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports 