Research Article

A Novel Method to Reduce the Laser Drilling Time for Hole Cluster considering the Influence of Residual Vibration of the Sample Stage

Figure 11

Residual vibration signal and corresponding delay time for different a with Vmax = 0.75 m s−1. (a) and (b) a = 1 m s−2, T = 1.1432 s; (c) and (d) a = 1.46 m s−2, T = 1.1019 s; (e) and (f) a = 2 m s−2, T = 1.1191 s.
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(b)
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