Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment

<div>The experimental system of the wafer stage. (a) Real experimental wafer stage system. (b) Explosive view of wafer stage structure.</div>

Shock and Vibration

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Figure 2

Figure 2: Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment 

Figure 2 | Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment 