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Shock and Vibration
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Shock and Vibration
/
2021
/
Article
/
Tab 1
/
Research Article
A New Joint Denoising Algorithm for High-G Calibration of MEMS Accelerometer Based on VMD-PE-Wavelet Threshold
Table 1
Structure parameters of the accelerometer’s beam and mass.
The beam
The mass
Shape parameters
Length (
a
1
)
Width (
b
1
)
Height (
c
1
)
Length (
a
2
)
Width (
b
2
)
Height (
c
1
)
Size (
μ
m)
350
800
80
800
800
200
