Effects of Strain Node on the Actuation Performance of Multilayer Cantilevered Piezoactuator with Segmented Electrodes

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td class="align_left">Material</td><td class="align_center">Si</td><td class="align_center">SiO<sub>2</sub></td><td class="align_center">Pt</td><td class="align_center">Piezoelectric</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td class="align_left">Density (kg/m3)</td><td class="align_center">2330</td><td class="align_center">2200</td><td class="align_center">21400</td><td class="align_center">7550</td></tr><tr><td class="align_left">Young’s modulus (GPa)</td><td class="align_center">170</td><td class="align_center">72</td><td class="align_center">168</td><td class="align_center">81</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Mechanical properties of the different materials.</div>

Shock and Vibration

tab3

Table 3

Table 3: Effects of Strain Node on the Actuation Performance of Multilayer Cantilevered Piezoactuator with Segmented Electrodes 