Sputtered Pd as Hydrogen Storage for a Chip-Integrated Microenergy System

<table>Performance tests of a microenergy systems with sputtered Pd as hydrogen storage; electrolysis/charge is carried out at <svg height="15.4" id="M65" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 19.487499 15.4" width="19.487499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.112)"><path d="M414 650l-6 -28q-63 -4 -78.5 -17.5t-27.5 -71.5l-77 -416q-11 -58 0.5 -71.5t77.5 -17.5l-5 -28h-275l8 28q63 4 79.5 18.5t27.5 70.5l80 416q11 57 -2 71t-81 18l6 28h273z" id="x1D43C"></path></g>
<g transform="matrix(.012,-0,0,-.012,7.487,15.187)"><path d="M390 111l17 -21q-34 -45 -80 -73.5t-89 -28.5q-91 0 -146 62t-55 147q0 118 101 195q74 57 149 57h1q59 0 90 -27q16 -14 16 -30q0 -15 -12 -29t-21 -14q-8 0 -19 11q-44 41 -101 41q-52 0 -87.5 -42.5t-35.5 -117.5q0 -49 15 -87t39 -58t49 -30t48 -10q33 0 60.5 12
t60.5 43z" id="x63"></path></g><g transform="matrix(.012,-0,0,-.012,12.461,15.187)"><path d="M513 0h-211v26q44 5 55 17t11 60v166q0 123 -98 123q-59 0 -104 -51v-238q0 -48 10 -60.5t55 -16.5v-26h-213l1 26q46 4 57 16t11 61v477q0 48 -9.5 58.5t-58.5 14.5v24q63 9 147 35v-336q73 73 143 73q64 0 101 -42t37 -129v-175q0 -49 11 -61t55 -16v-26z" id="x68"></path></g>
</svg> = 5 mA, <svg height="14.4125" id="M66" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 17.862499 14.4125" width="17.862499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,10.125)"><path d="M324 430l-26 -36l-112 -4l-55 -265q-13 -66 7 -66q13 0 44.5 20t50.5 40l17 -24q-38 -40 -85.5 -73.5t-87.5 -33.5q-50 0 -21 138l55 262h-80l-2 8l25 34h66l25 99l78 63l10 -9l-37 -153h128z" id="x1D461"></path></g>
<g transform="matrix(.012,-0,0,-.012,5.862,14.2)"><path d="M390 111l17 -21q-34 -45 -80 -73.5t-89 -28.5q-91 0 -146 62t-55 147q0 118 101 195q74 57 149 57h1q59 0 90 -27q16 -14 16 -30q0 -15 -12 -29t-21 -14q-8 0 -19 11q-44 41 -101 41q-52 0 -87.5 -42.5t-35.5 -117.5q0 -49 15 -87t39 -58t49 -30t48 -10q33 0 60.5 12
t60.5 43z" id="x63"></path></g><g transform="matrix(.012,-0,0,-.012,10.824,14.2)"><path d="M513 0h-211v26q44 5 55 17t11 60v166q0 123 -98 123q-59 0 -104 -51v-238q0 -48 10 -60.5t55 -16.5v-26h-213l1 26q46 4 57 16t11 61v477q0 48 -9.5 58.5t-58.5 14.5v24q63 9 147 35v-336q73 73 143 73q64 0 101 -42t37 -129v-175q0 -49 11 -61t55 -16v-26z" id="x68"></path></g>
</svg> = 2 min; fuel cell/discharge is carried out at <svg height="15.4" id="M67" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 25.775 15.4" width="25.775" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.112)"><path d="M414 650l-6 -28q-63 -4 -78.5 -17.5t-27.5 -71.5l-77 -416q-11 -58 0.5 -71.5t77.5 -17.5l-5 -28h-275l8 28q63 4 79.5 18.5t27.5 70.5l80 416q11 57 -2 71t-81 18l6 28h273z" id="x1D43C"></path></g>
<g transform="matrix(.012,-0,0,-.012,7.487,15.187)"><path d="M517 51v-25q-101 -18 -155 -38v65l-61 -36q-50 -29 -78 -29q-68 0 -126.5 58t-58.5 155q0 103 77 175.5t180 72.5q36 0 67 -12v143q0 48 -11.5 58.5t-65.5 14.5v25q79 9 156 34v-597q0 -38 7.5 -48t36.5 -13zM362 85v275q-35 51 -103 51q-20 0 -40.5 -8.5t-42 -28
t-35 -57.5t-13.5 -89q0 -83 42 -130t96 -47q51 0 96 34z" id="x64"></path></g><g transform="matrix(.012,-0,0,-.012,13.77,15.187)"><path d="M390 111l17 -21q-34 -45 -80 -73.5t-89 -28.5q-91 0 -146 62t-55 147q0 118 101 195q74 57 149 57h1q59 0 90 -27q16 -14 16 -30q0 -15 -12 -29t-21 -14q-8 0 -19 11q-44 41 -101 41q-52 0 -87.5 -42.5t-35.5 -117.5q0 -49 15 -87t39 -58t49 -30t48 -10q33 0 60.5 12
t60.5 43z" id="x63"></path></g><g transform="matrix(.012,-0,0,-.012,18.744,15.187)"><path d="M513 0h-211v26q44 5 55 17t11 60v166q0 123 -98 123q-59 0 -104 -51v-238q0 -48 10 -60.5t55 -16.5v-26h-213l1 26q46 4 57 16t11 61v477q0 48 -9.5 58.5t-58.5 14.5v24q63 9 147 35v-336q73 73 143 73q64 0 101 -42t37 -129v-175q0 -49 11 -61t55 -16v-26z" id="x68"></path></g>
</svg> = 10 <i>μ</i>A, <svg height="14.4125" id="M68" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 24.137501 14.4125" width="24.137501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,10.125)"><path d="M324 430l-26 -36l-112 -4l-55 -265q-13 -66 7 -66q13 0 44.5 20t50.5 40l17 -24q-38 -40 -85.5 -73.5t-87.5 -33.5q-50 0 -21 138l55 262h-80l-2 8l25 34h66l25 99l78 63l10 -9l-37 -153h128z" id="x1D461"></path></g>
<g transform="matrix(.012,-0,0,-.012,5.862,14.2)"><path d="M517 51v-25q-101 -18 -155 -38v65l-61 -36q-50 -29 -78 -29q-68 0 -126.5 58t-58.5 155q0 103 77 175.5t180 72.5q36 0 67 -12v143q0 48 -11.5 58.5t-65.5 14.5v25q79 9 156 34v-597q0 -38 7.5 -48t36.5 -13zM362 85v275q-35 51 -103 51q-20 0 -40.5 -8.5t-42 -28
t-35 -57.5t-13.5 -89q0 -83 42 -130t96 -47q51 0 96 34z" id="x64"></path></g><g transform="matrix(.012,-0,0,-.012,12.145,14.2)"><path d="M390 111l17 -21q-34 -45 -80 -73.5t-89 -28.5q-91 0 -146 62t-55 147q0 118 101 195q74 57 149 57h1q59 0 90 -27q16 -14 16 -30q0 -15 -12 -29t-21 -14q-8 0 -19 11q-44 41 -101 41q-52 0 -87.5 -42.5t-35.5 -117.5q0 -49 15 -87t39 -58t49 -30t48 -10q33 0 60.5 12
t60.5 43z" id="x63"></path></g><g transform="matrix(.012,-0,0,-.012,17.107,14.2)"><path d="M513 0h-211v26q44 5 55 17t11 60v166q0 123 -98 123q-59 0 -104 -51v-238q0 -48 10 -60.5t55 -16.5v-26h-213l1 26q46 4 57 16t11 61v477q0 48 -9.5 58.5t-58.5 14.5v24q63 9 147 35v-336q73 73 143 73q64 0 101 -42t37 -129v-175q0 -49 11 -61t55 -16v-26z" id="x68"></path></g>
</svg> = 20 min.</table>

The Scientific World Journal

fig8

Figure 8

Figure 8: Sputtered Pd as Hydrogen Storage for a Chip-Integrated Microenergy System 