Sputtered Pd as Hydrogen Storage for a Chip-Integrated Microenergy System

Table 2

Dependence of deposition rate and crystallite size on the pressure.

𝑝Ar (mbar)	5⋅10^−3	1⋅10^−2	2⋅10^−2	4⋅10^−2	8⋅10^−2	1⋅10^−1
Sputter rate (nm·min^−1)	7.8	7.5	7.34	6.9	4.5	3.2
Crystal size (nm)	33.0	27.5	22.0	18.0	17.5	19.0