A New Optical Surface Measurement Method with Iterative Sparsity-Constrained Threshold Phase Retrieval Algorithm

Table 1

The PV and RMS of different techniques.

	SBMIR	4f-SPAR	ITPRS
PV	0.092094	0.022985	0.019876; (13.4% less)
RMS	0.0061031	0.0016859	0.00067075; (60% less)