Table 1: Targeting error against reference positions [10].

Reference positionsError without compensationError with compensation
-axis-axisRMS-axis-axisRMS

162.9052.1981.7316.9522.0427.81
24.545.957.494.293.415.48
36.336.959.400.545.875.89
42.40.542.5114.047.2515.80
57.793.258.4410.120.9110.16

Unit: pixel.