Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator

Table 2

Parameters of spring design.

Parameters	Values
Young’s modulus, 𝐸	1.70 × 10^11 Pa
Thickness, 𝑡	100 𝜇m
Number of cantilever beams, 𝑁	4
Width, 𝑤	2 𝜇m
Length, 𝑙	1000 𝜇m