Research Article

The Process of Nanostructuring of Metal (Iron) Matrix in Composite Materials for Directional Control of the Mechanical Properties

Table 2

Macrohardness and characterization of the microstructure of samples obtained by alternating exposures of titanium tetrachloride-methane.

T, °CNumber of cycles of ALD reactionsHV, kg/mmDescription of microstructures

200184Absence of reaction by XRD, nonuniform film
282
4150
5144
6210

300180Absence of reaction by XRD, nonuniform film
263
4120
5380
6465

4001340Uniform fine-grained structure
2303
4690
51302
61280

4501684Uniform fine-grained structure
2905
41010
51260
61200

5001204The appearance of chlorine excess which is manifested in the nonuniform structure
2660
4785
5550
6930

5501340Increasing heterogeneity of structure centers
2280
4833
5535
6650