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Advances in Condensed Matter Physics
Volume 2011, Article ID 541318, 6 pages
http://dx.doi.org/10.1155/2011/541318
Research Article

TEM Observation of the Dislocations Nucleated from Cracks inside Lightly or Heavily Doped Czochralski Silicon Wafers

Department of System Engineering, Okayama Prefectural University, 111 Kuboki, Soja, Okayama 719-1197, Japan

Received 11 January 2011; Accepted 21 February 2011

Academic Editor: Rosa Lukaszew

Copyright © 2011 Seiji Shiba and Koji Sueoka. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Seiji Shiba and Koji Sueoka, “TEM Observation of the Dislocations Nucleated from Cracks inside Lightly or Heavily Doped Czochralski Silicon Wafers,” Advances in Condensed Matter Physics, vol. 2011, Article ID 541318, 6 pages, 2011. https://doi.org/10.1155/2011/541318.