Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films

<table>Comparison of the dependence of residual stress on film thickness in as-deposited  GZO films prepared at 180°C by (a) RPD, (b) dc MS, and (c) rf + dc MS.</table>

Advances in Materials Science and Engineering

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Figure 3

Figure 3: Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films 