Table of Contents Author Guidelines Submit a Manuscript
Advances in Materials Science and Engineering
Volume 2011 (2011), Article ID 974906, 5 pages
http://dx.doi.org/10.1155/2011/974906
Research Article

The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications

Nano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, Malaysia

Received 15 April 2011; Revised 29 May 2011; Accepted 6 June 2011

Academic Editor: A. John Peter

Copyright © 2011 N. D. Md Sin et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. N. Zhang, K. Yu, Z. Zhu, and D. Jiang, “Synthesis and humidity sensing properties of feather-like ZnO nanostructures with macroscale in shape,” Sensors and Actuators A, vol. 143, no. 2, pp. 245–250, 2008. View at Publisher · View at Google Scholar · View at Scopus
  2. Y. Zhang, K. Yu, D. Jiang, Z. Zhu, H. Geng, and L. Luo, “Zinc oxide nanorod and nanowire for humidity sensor,” Applied Surface Science, vol. 242, no. 1-2, pp. 212–217, 2005. View at Publisher · View at Google Scholar · View at Scopus
  3. A. Erol, S. Okur, B. Comba, Ö. Mermer, and M. C. Arikan, “Humidity sensing properties of ZnO nanoparticles synthesized by sol-gel process,” Sensors and Actuators B, vol. 145, no. 1, pp. 174–180, 2010. View at Publisher · View at Google Scholar · View at Scopus
  4. H. K. Kim, S. D. Sathaye, Y. K. Hwang et al., “Humidity sensing properties of nanoporous TiO2-SnO2 ceramic sensors,” Bulletin of the Korean Chemical Society, vol. 26, no. 11, pp. 1881–1884, 2005. View at Google Scholar · View at Scopus
  5. Q. Kuang, C. Lao, Z. L. Wang, Z. Xie, and L. Zheng, “High-sensitivity humidity sensor based on a single SnO2 nanowire,” Journal of the American Chemical Society, vol. 129, no. 19, pp. 6070–6071, 2007. View at Publisher · View at Google Scholar · View at PubMed · View at Scopus
  6. L. Schmidt-Mende and J. L. MacManus-Driscoll, “ZnO—nanostructures, defects, and devices,” Materials Today, vol. 10, no. 5, pp. 40–48, 2007. View at Publisher · View at Google Scholar
  7. Z. L. Wang, “Nanostructures of zinc oxide,” Materials Today, vol. 7, no. 6, pp. 26–33, 2004. View at Publisher · View at Google Scholar · View at Scopus
  8. X. Wang, J. Zhang, Z. Zhu, and J. Zhu, “Humidity sensing properties of Pd2+-doped ZnO nanotetrapods,” Applied Surface Science, vol. 253, no. 6, pp. 3168–3173, 2007. View at Publisher · View at Google Scholar · View at Scopus
  9. W. Yun, T. W. Y. John, Senior Member IEEE, and C. Liang-Yih, “Synthesis of aligned zinc oxide nanorods for humidity sensing,” in Proceedings of the 3rd International Conference on Sensing Technology (ICST '08), pp. 670–673, December 2008. View at Publisher · View at Google Scholar
  10. W. P. Tai and J. H. Oh, “Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol-gel process,” Journal of Materials Science: Materials in Electronics, vol. 13, no. 7, pp. 391–394, 2002. View at Publisher · View at Google Scholar · View at Scopus
  11. W. P. Tai and J. H. Oh, “Humidity sensitive properties of nanostructured Al-doped ZnO: TiO 2 thin films,” Sensors and Actuators B, vol. 96, no. 3, pp. 477–481, 2003. View at Publisher · View at Google Scholar
  12. M. H. Mamat, M. Z. Sahdan, Z. Khusaimi, A. Z. Ahmed, S. Abdullah, and M. Rusop, “Influence of doping concentrations on the aluminum doped zinc oxide thin films properties for ultraviolet photoconductive sensor applications,” Optical Materials, vol. 32, no. 6, pp. 696–699, 2010. View at Publisher · View at Google Scholar · View at Scopus