Effect of Ar/CH₄ Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering

Table 2

Sample identical	RMS roughness (nm)	Ave. roughness (nm)	Max.height (nm)	Ave. height (nm)
Ar	93	80	590	210
Ar/CH4 1 : 2	30	25	184	70
Ar/CH4 1 : 5	25	20	132	46
Ar/CH4 1 : 10	4	3	27	11