Advances in Materials Science and Engineering / 2013 / Article / Fig 2

Research Article

Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering

Figure 2

The thickness and the crystalline size for the sputtered AZO films versus (a) the incident RF power and (b) the substrate temperature.
401392.fig.002a
(a)
401392.fig.002b
(b)

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