Advances in Materials Science and Engineering / 2013 / Article / Fig 3

Research Article

Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering

Figure 3

The in-plane stress for the AZO as deposited at 325°C with (a) various RF power and (b) various substrate temperatures.
401392.fig.003a
(a)
401392.fig.003b
(b)

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