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Advances in Materials Science and Engineering
Volume 2013, Article ID 506549, 3 pages
Research Article

The Effect of Deposition Rate on Morphology and Structural Properties of Carbon-Nickel Composite Films

1Department of Physics, Razi University, Kermanshah 67149-67346, Iran
2Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

Received 2 June 2013; Accepted 22 July 2013

Academic Editor: Mahmood Ghoranneviss

Copyright © 2013 Smohammad Elahi et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Carbon-nickel films were grown by radio frequency magnetron cosputtering on glass substrates. The films were deposited under different deposition times, from 50 to 600 sec, at room temperature. We noticed that up to 180 sec the sputtering occurs in more metal content mode and in greater than 180 sec it occurs in more nonmetal content mode. It is shown that the structural and morphological properties of carbon-nickel films were strongly influenced by this behavior.