Advances in Materials Science and Engineering / 2013 / Article / Fig 6

Research Article

Comparison of H2 and NH3 Treatments for Copper Interconnects

Figure 6

(a) OM image of bubble-like defects; (b) cross-section SEM images of a bubble defect.

Article of the Year Award: Outstanding research contributions of 2020, as selected by our Chief Editors. Read the winning articles.