Journals
Publish with us
Publishing partnerships
About us
Blog
Advances in Materials Science and Engineering
Journal overview
For authors
For reviewers
For editors
Table of Contents
Special Issues
Advances in Materials Science and Engineering
/
2013
/
Article
/
Fig 3
/
Research Article
Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures
Figure 3
Indentation profile used for the indentation experiments.