Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures

Table 2

LS SiN Young’s modulus experiment.

Sample	𝐸𝑟 (GPa)					E (GPa)
	1	2	3	4	Average
1P19	197.29	181.02	183.15	196.27	189.43	214.92
1P20	219.53	221.14	203.86	201.09	211.40	245.48
1P21	211.28	188.60	191.03	191.17	195.52	223.24
1P22	187.31	186.96	187.41	189.42	187.78	212.67
Average (GPa)						224.08