Research Article
Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures
Table 2
LS SiN Young’s modulus experiment.
| Sample |
(GPa) | E (GPa) | 1 | 2 | 3 | 4 | Average |
| 1P19 | 197.29 | 181.02 | 183.15 | 196.27 | 189.43 | 214.92 | 1P20 | 219.53 | 221.14 | 203.86 | 201.09 | 211.40 | 245.48 | 1P21 | 211.28 | 188.60 | 191.03 | 191.17 | 195.52 | 223.24 | 1P22 | 187.31 | 186.96 | 187.41 | 189.42 | 187.78 | 212.67 |
| Average (GPa) | 224.08 |
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