Improving Barrier Properties of PET by Depositing a Layer of DLC Films on Surface

Table 2

𝐼_𝐷/𝐼_𝐺 ratios under different process conditions.

Ar : C2H2	RF power (W)	Time (s)	Gas flow rate; (sccm)	Oxygen permeability; (cm^3/m^2 · 24 h · 0.1 MPa)	Water vapor permeability; (g/m^2 · 24 h)	𝐼𝐷/𝐼𝐺 ratio
1 : 2	600	30	30	12.16	4.01	0.76
1 : 2	900	30	30	18.76	7.69	0.79
1 : 2	600	20	30	27.89	11.03	0.89
2 : 1	600	30	30	32.78	13.73	1.04
3 : 1	600	30	30	46.91	21.25	1.25