Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Figure 5
(Color online) (a) SEM image of Mo oxide lines. (b) SEM image of the same region as in (a) after Pt deposition of the protective layer on the top of three lines. (c) TEM image of the lamella showing a cross-section of the Mo oxide line. (d) HAADAF image in STEM mode of the same region showed in (c). (e) HAADAF high-resolution image of the Mo and Mo oxide. (f) EELS spectra containing both the O K core-loss (right) and the Mo M3 core-loss (left) of Mo (black line) and MoO3 (red line).
