Design and Fabrication of the Large Thrust Force Piezoelectric Actuator

<table>The vibrating amplitudes in the <svg height="11.175" id="M86" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 13.5875 11.175" width="13.5875" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.113)"><path d="M775 650l-6 -28q-60 -6 -81.5 -16t-61.5 -54l-175 -191l125 -243q30 -58 48.5 -71t82.5 -19l-5 -28h-275l7 28l35 4q31 4 37 12t-6 34l-108 216q-140 -165 -177 -219q-16 -22 -10.5 -30.5t41.5 -13.5l22 -3l-7 -28h-244l8 28q52 4 75 15.5t67 52.5q48 46 206 231
l-110 215q-26 51 -44 63t-72 17l6 28h250l-6 -28l-27 -4q-30 -5 -35 -10t3 -27q17 -43 95 -190q70 78 154 185q15 21 10 29.5t-33 12.5l-30 4l5 28h236z" id="x1D44B"></path></g>
</svg>-direction and the <svg height="11.175" id="M87" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 11.6625 11.175" width="11.6625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.113)"><path d="M667 650l-9 -28q-53 -5 -76 -17t-64 -59q-51 -61 -175 -225q-21 -29 -27 -55l-27 -136q-13 -65 -0.5 -80t83.5 -22l-7 -28h-280l8 28q64 4 81 19t30 83l25 128q6 35 -7 65l-98 231q-17 41 -32.5 52t-68.5 16l8 28h252l-6 -28l-40 -4q-27 -3 -33 -12.5t2 -31.5
q8 -26 43 -107.5t61 -134.5q114 145 174 240q14 24 8 33t-37 13l-34 4l8 28h238z" id="x1D44C"></path></g>
</svg>-direction along the length of piezoelectric plate. </table>

Advances in Materials Science and Engineering

fig5

Figure 5

Figure 5: Design and Fabrication of the Large Thrust Force Piezoelectric Actuator 