Design and Fabrication of the Large Thrust Force Piezoelectric Actuator

Table 3

The response table in 𝑌-direction (unit: m).

	𝐴	𝐵	𝐶	𝐷
Level 1	6.42𝐸−8	4.96𝐸−8	8.80𝐸−8	7.77𝐸−8
Level 2	7.32𝐸−8	8.29𝐸−8	5.93𝐸−8	5.90𝐸−8
Level 3		7.35𝐸−8	5.88𝐸−8	6.93𝐸−8
Range	9.01𝐸−9	3.34𝐸−8	2.92𝐸−8	1.87𝐸−8
Rank	4	1	2	3