Optimization of the Cathode Arc Plasma Deposition Processing Parameters of ZnO Film Using the Grey-Relational Taguchi Method

<table class="table-group" id="tab6"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td align="left">Resistivity</td><td align="center">Transmittance</td></tr><tr class="thead"><td align="center" colspan="2">Experiment number 9 (<i>A</i>3 <i>B</i>2 <i>C</i>1)</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td align="left"><svg height="16.049999" id="M60" style="vertical-align:-0.3135pt" version="1.1" viewbox="0 0 75.650002 16.049999" width="75.650002" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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<g transform="matrix(.012,-0,0,-.012,62.262,7.613)"><path d="M535 230h-483v50h483v-50z" id="x2212"></path></g><g transform="matrix(.012,-0,0,-.012,69.247,7.613)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
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</svg>  Ω-cm</td><td align="center">88.17%</td></tr><tr><td align="center" colspan="2"><hr/></td></tr><tr><td align="center" colspan="2">Grey-relational prediction design (<i>A</i>3 <i>B</i>1 <i>C</i>1)</td></tr><tr><td align="left"><svg height="16.049999" id="M61" style="vertical-align:-0.3135pt" version="1.1" viewbox="0 0 75.650002 16.049999" width="75.650002" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg>  Ω-cm</td><td align="center">88.82%</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Results of confirmation test for multiple performance characteristics of ZnO thin films.

Advances in Materials Science and Engineering

tab6

Table 6

Table 6: Optimization of the Cathode Arc Plasma Deposition Processing Parameters of ZnO Film Using the Grey-Relational Taguchi Method 