Development of Pd Alloy Hydrogen Separation Membranes with Dense/Porous Hybrid Structure for High Hydrogen Perm-Selectivity

<div>Surface and cross-sectional FE-SEM images of sputter as-deposited Pd/Cu and Pd-Cu alloy films after the Cu-reflow process for various sputtering variables: (a), (c), (e) sputter as-deposited films; (b), (d), (f) Pd-Cu alloy films after heat treatment.</div>

Advances in Materials Science and Engineering

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Figure 3

Figure 3: Development of Pd Alloy Hydrogen Separation Membranes with Dense/Porous Hybrid Structure for High Hydrogen Perm-Selectivity 