A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF<sub>3</sub>/O<sub>2</sub> and SF<sub>6</sub>/O<sub>2</sub>

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Advances in Materials Science and Engineering

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Figure 6

Figure 6: A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF<sub>3</sub>/O<sub>2</sub> and SF<sub>6</sub>/O<sub>2</sub> 

Advances in Materials Science and Engineering

A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF3/O2 and SF6/O2

Figure 6

A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF₃/O₂ and SF₆/O₂