A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF₃/O₂ and SF₆/O₂

Figure 7

(a) Distribution of etch rate versus 𝐼(𝐅), (b) distribution of etch rate versus 𝐼(𝐅) × 𝑉_ℎ+𝑉_𝑙, and (c) distribution of etch rate versus 𝐼(𝐅) × 𝑉_𝑙.

(a)

(b)

(c)