Research Article

Synthesis and Characterization of SiO2 Nanoparticles and Their Efficacy in Chemical Mechanical Polishing Steel Substrate

Table 1

Physical properties of the pad supplier.

Thickness (mm)1.2
Weight (g/m2)350
Density (g/m3)0.40
Compressibility (%)8.5
Elasticity (%)82
Pore size ( m)40