Fabrication of Ni-Mn Microprobe Structure with Low Internal Stress and High Hardness by Employing DC Electrodeposition

<table>The schematic diagram of the test setup for probe fatigue life.</table>

Advances in Materials Science and Engineering

Figure 7: Fabrication of Ni-Mn Microprobe Structure with Low Internal Stress and High Hardness by Employing DC Electrodeposition 