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Advances in Materials Science and Engineering
Volume 2014, Article ID 979450, 6 pages
http://dx.doi.org/10.1155/2014/979450
Research Article

Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode

1Scientific Educational Center of Nanotechnologies, North-Caucasus Federal University, Stavropol 355029, Russia
2Southern Scientific Center of Russian Academy of Sciences, Rostov-on-Don 344006, Russia

Received 9 May 2013; Accepted 5 November 2013; Published 23 January 2014

Academic Editor: Maria Loi

Copyright © 2014 E. F. Shevchenko et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

E. F. Shevchenko, V. A. Tarala, M. Yu. Shevchenko, and A. A. Titarenko, “Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode,” Advances in Materials Science and Engineering, vol. 2014, Article ID 979450, 6 pages, 2014. https://doi.org/10.1155/2014/979450.