Research Article
Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode
Figure 2
The energy spectra of ions of different gases. 1: dimethyldichlorosilane; 2: air; 3: propane; 4: argon; = 0.2 A, Q = 2.4 m3 × mPa/s. , eV: 1: 64; 2: 53.5; 3: 56; 4: 55.
