Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate

<table>HR-XRD 2<i>θ</i>-<i>ω</i> scans of the (0002) reflection of the AlInN/GaN/Al<sub>2</sub>O<sub>3</sub> samples.</table>

Advances in Materials Science and Engineering

Figure 3: Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate 