Research Article

Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate

Figure 4

Phi scan curve of asymmetric (10–15) reflection plane of the (a) GaN and (b) AlInN for sample A. Every peak shows azimuths of the (10–15) plane. The diffractive peak repeats every ~60°.
980639.fig.004a
(a)
980639.fig.004b
(b)