Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate
Figure 6
HR-XRD reciprocal space-maps of the (10–15) reflection for AlInN/GaN/Al2O3 structures with different indium content. In content changes as (a) 4%, (b) 18%, (c) 20%, (d) 47, and (e) 48%.