Research Article

Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate

Figure 7

W-H plot for AlInN layers. (a) Triple-axis--scan and (b) triple-axis --scan were measured for the symmetric () reflections indicated in the figure. The lines result from a linear fit of the data.
980639.fig.007a
(a)
980639.fig.007b
(b)