Mosaic Structure Characterization of the AlInN Layer Grown on Sapphire Substrate

Figure 8

FWHM of and -scans for (10–15), (10–12), (12–31) reflections, recorded in skew diffraction geometry, of the AlInN layer as a function of the inclination angle for sample B . FWHMs of ω-scan increase with the increment of angle, while those of -scan decrease. The lines are a guide for the eyes.